Browsing by Author "Lin, Hung-Ruei"

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Design and Analysis of a 2-DOF Planar Nano-positioner with Low Parasitic Rotation
(2014)
Lin, Hung-Ruei
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Hung, Shao-Kang
;
Cheng, Chiao-Hua
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機械工程學系
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Department of Mechanical Engineering
This paper presents the design processes and performance of a new piezoactuated nano-positioner with low parasitic rotation. The flexure-based stage is composed of two symmetric flexure guiding mechanisms and two piezo stack actuators (PSAs) which have a 45 degree angle with X and Y directions. By analyzing the layout of the stage with kinematics and finite element analysis (FEA) results, it shows that this novel design offers a characteristic of low parasitic rotation. Analytical models of PSAs and stage are derived to assess the performances and to decide the parameters of geometry sizes of the hinge and the stage, total stroke, maximum von-Mises stress, and lifetime. A prototype of the stage is then fabricated, and its performances are tested. Two laser displacement sensors and PID control method are used to achieve a feedback control of the system. Experimental results reveal that the stage has stroke of 500 mu m x 500 mu m, resolution of 10 nm, and maximum parasitic rotation of 0.48 arc sec under stroke of +/- 50 mu m.
Design and quasi-static characteristics study on a planar piezoelectric nanopositioner with ultralow parasitic rotation
(2015-10-01)
Lin, Hung-Ruei
;
Cheng, Chiao-Hua
;
Hung, Shao-Kang
;
機械工程學系
;
Department of Mechanical Engineering
This paper presents a particular mechanism design which is inherently inclined to have no parasitic rotation. The flexure-based stage comprises symmetric flexure guiding mechanism and two piezoelectric stack actuators. The layout of the stage is evaluated by finite element analysis, and the results indicate that the proposed design exhibits ultralow parasitic rotation. A prototype of the stage is then fabricated, and its performance is tested. Experimental results show that the stage has a stroke of 500 mu m x 500 mu m and the crosstalk is less than 1%. The maximum parasitic rotation is +/- 1.2 arcsec at a stroke of 500 mu m. (C) 2015 Elsevier Ltd. All rights reserved.