Browsing by Author "Lin, You-Da"

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Effects of oxygen in Ni films on Ni-induced lateral crystallization of amorphous silicon films at various temperatures
(2006-09-01)
Lin, You-Da
;
Wu, Yewchung Sermon
;
材料科學與工程學系
;
Department of Materials Science and Engineering
Effects of oxygen in Ni films on. the Ni-induced lateral crystallization (NILC) of amorphous silicon (a-Si) films at various temperatures have been investigated. It was found that oxygen in Ni films retarded the nucleation of polycrystalline silicon (poly-Si) from a-Si, but had little effect on the growth rate of poly-Si. This is because that needed an incubation period to be reduced to Ni metal for the subsequent mediated crystallization of a-Si.