Browsing by Author "Lin, Yung-Jiun"
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Item type:Item, A micromirror with large static rotation and vertical actuation(2007-03-01) ;Chiou, Jin-Chern ;Kou, Chin-Fu ;Lin, Yung-Jiun ;電控工程研究所Institute of Electrical and Control EngineeringA micromirror with large rotation angle and vertical displacement is proposed and developed. The proposed micromirror is actuated by newly developed prestress comb drive actuators, which exhibit no pull-in, no hysteresis, and large vertical displacement range characteristics. The micromirror was fabricated using commercially available PolyMUMPs. Experimental results indicated that the maximum rotation angle and vertical displacement of the device are 26 and 45 mu m, respectively.Item type:Item, Analyze fluorescent characteristic of cancer cell using hyperspectroscopic imaging system (HIS)(2012-01-01) ;Hsieh, Yao-Fang ;Chen, Chih-Hsien ;Mang, Ou-Yang ;Duann, Jeng-RenChiou, Jin-ChernCurrently, the cancer was examined by diagnosing the pathological changes of tumor. If the examination of cancer can diagnose the tumor before the cell occur the pathological changes, the cure rate of cancer will increase. This research develops a human-machine interface for hyper-spectral microscope. The hyper-spectral microscope can scan the specific area of cell and records the data of spectrum and intensity. These data is helpful to diagnose tumor. This study finds the hyper-spectral imaging have two higher intensity points at 550nm and 700nm, and one lower point at 640nm between the two higher points. For analyzing the hyper-spectral imaging, the intensity at the 550nm peak divided by the intensity at 700nm peak. Finally, we determine the accuracy of detection by Gaussian distribution. The accuracy of detecting normal cells achieves 89%, and the accuracy of cancer cells achieves 81%.Item type:Item, CMOS-MEMS prestress vertical cantilever resonator with electrostatic driving and piezoresistive sensing(2008-10-21) ;Chiou, Jin-Chern ;Shieh, Li-Jung ;Lin, Yung-Jiun ;電控工程研究所Institute of Electrical and Control EngineeringThis paper presents a CMOS-MEMS prestress vertical comb-drive resonator with a piezoresistive sensor to detect its static and dynamic response. The proposed resonator consists of a set of comb fingers fabricated along with a composite beam. One end of the composite beam is clamped to the anchor, while the other is elevated by residual stress. Actuation occurs when the electrostatic force, induced by the fringe effect, pulls the composite beam downwards to the substrate. The initial tip height at the free end of the resonator due to residual stress is approximately 60 mu m. A piezoresistor is designed to sense the vertical deflection and vibration of the resonator. The relative change in the resistance of the piezoresistor (Delta R/R) is about 0.52% when a voltage of 100V is applied in static mode. The first resonant frequency of the device is 14.5 kHz, and the quality factor is around 36 in air. The device is fabricated through TSMC 0.35 mu m 2p4m CMOS process and post-CMOS process.Item type:Item, Design, Fabrication, and Actuation of Micro-Electro-Mechanical System-Based Image Stabilizer(2010) ;Chiou, Jin-Chern ;Hung, Chen-Chun ;Lin, Chun-Ying ;Lin, Yung-Jiun電控工程研究所In this investigation, we present a two dimensional high aspect ratio XY stage, designed as an image stabilizer. This stabilizer is 8 x 8 x 0.75 mm(3), and sufficiently strong to support a suspended image sensor for anti-shaking photographic function. This stabilizer is fabricated by the silicon-on-glass (SOG) process including inductively coupled plasma reactive ion etching (ICP-RIE) processes, in which the anchor layer, pre-etching layer and structure layers are identified without an additional release step as is required in traditional silicon-on-insulator (SOI) wafer etching process. When an actuator is fabricated, flip-chip bonding is adopted to attach a 3 megapixel image sensor to this device. The longest calculated traveling distance of the stabilizer is 25 mu m and special stoppers are designed to prevent the actuator from moving out of range, and sticking to the side by pull-in phenomenon. Accordingly, the applied voltage at the 25 mu m moving distance is 84 V. Furthermore, the dynamic resonant frequency of the actuating device with an image sensor is 1.013 kHz. (C) 2010 The Japan Society of Applied PhysicsItem type:Item, Design, fabrication, and control of components in MEMS-based optical pickups(2007-02-01) ;Chiu, Yi ;Chiou, Jin-Chern ;Fang, Weileun ;Lin, Yung-JiunWu, MingchingSmall-form-factor optical pickups and disk drives have been an area of intense research since the rise of portable consumer electronic products. In current technology, most of the devices are manufactured by the precision assembly of discrete miniaturized optomechanical components. The assembly process can be simplified and cost reduced by using the batch fabrication processes developed in microelectro-mechanical systems (MEMS). In this paper, the fabrication and testing of optical and actuator components for a MEMS-based optical pickup are presented. A novel design methodology is also applied to the servo control system of the pickup.Item type:Item, Extending the traveling range with a cascade electrostatic comb-drive actuator(2008-01-01) ;Chiou, Jin-Chern ;Lin, Yung-Jiun ;Kuo, Chin-Fu ;電控工程研究所Institute of Electrical and Control EngineeringElectrostatic comb-drive actuators have been developed and employed for many applications. However, side stability (side pull-in) limits the actuator stroke constraining its applications. Hence, extending the stable traveling range is an important issue for designing electrostatic comb-drive actuators. This study presents a novel cascade electrostatic comb-drive actuator. Instead of shifting the spring constant of the suspended springs, the proposed actuator extends the stable traveling range using a multi-stage cascade configuration. To demonstrate the performance of the cascade configuration, simulation using the finite element method is utilized to model the proposed cascade actuator. To implement the cascade electrostatic comb-drive actuator, the Taiwan Semiconductor Manufacturing Company (TSMC) 0.35 mu m two-polysilicon and four-metal layer (2p4m) CMOS processes and post-CMOS micromachining steps are employed to fabricate the device. Experimental results demonstrate that the proposed design extends the stable traveling range to 200% as compared with that of a comb-drive actuator without this cascade configuration.Item type:Item, Portable LED-induced autofluorescence spectroscopy for oral cancer diagnosis(2017-04-01) ;Yan, Yung-Jhe ;Huang, Ting-Wei ;Cheng, Nai-Lun ;Hsieh, Yao-FangTsai, Ming-HsuiOral cancer is a serious and growing problem in many developing and developed countries. To improve the cancer screening procedure, we developed a portable light-emitting-diode (LED)-induced autofluorescence (LIAF) imager that contains two wavelength LED excitation light sources and multiple filters to capture ex vivo oral tissue autofluorescence images. Compared with conventional means of oral cancer diagnosis, the LIAF imager is a handier, faster, and more highly reliable solution. The compact design with a tiny probe allows clinicians to easily observe autofluorescence images of hidden areas located in concave deep oral cavities. The ex vivo trials conducted in Taiwan present the design and prototype of the portable LIAF imager used for analyzing 31 patients with 221 measurement points. Using the normalized factor of normal tissues under the excitation source with 365 nm of the central wavelength and without the bandpass filter, the results revealed that the sensitivity was larger than 84%, the specificity was not smaller than over 76%, the accuracy was about 80%, and the area under curve of the receiver operating characteristic (ROC) was achieved at about 87%, respectively. The fact shows the LIAF spectroscopy has the possibilities of ex vivo diagnosis and noninvasive examinations for oral cancer. (C) 2017 Society of Photo-Optical Instrumentation Engineers (SPIE)Item type:Item, Separating spectral mixtures in hyperspectral image data using independent component analysis: validation with oral cancer tissue sections(2013-12-01) ;Duann, Jeng-Ren ;Jan, Chia-Ing ;Ou-Yang, Mang ;Lin, Chia-YiMo, Jen-FengRecently, hyperspectral imaging (HSI) systems, which can provide 100 or more wavelengths of emission autofluorescence measures, have been used to delineate more complete spectral patterns associated with certain molecules relevant to cancerization. Such a spectral fingerprint may reliably correspond to a certain type of molecule and thus can be treated as a biomarker for the presence of that molecule. However, the outcomes of HSI systems can be a complex mixture of characteristic spectra of a variety of molecules as well as optical interferences due to reflection, scattering, and refraction. As a result, the mixed nature of raw HSI data might obscure the extraction of consistent spectral fingerprints. Here we present the extraction of the characteristic spectra associated with keratinized tissues from the HSI data of tissue sections from 30 oral cancer patients (31 tissue samples in total), excited at two different wavelength ranges (330 to 385 and 470 to 490 nm), using independent and principal component analysis (ICA and PCA) methods. The results showed that for both excitation wavelength ranges, ICA was able to resolve much more reliable spectral fingerprints associated with the keratinized tissues for all the oral cancer tissue sections with significantly higher mean correlation coefficients as compared to PCA (p < 0.001). (C) The Authors.Item type:Item, The new hyperspectral microscopic system for cancer diagnosis(2011-01-01) ;Hsieh, Yao-Fang ;Mang, Ou-Yang ;Chiou, Jin-Chern ;Lin, Yung-JiunTsai, Ming-HsuiUntil now, the cancer was examined by diagnosing the pathological changes of tumor. If the examination of cancer can diagnose the tumor before the cell occur the pathological changes, the cure rate of cancer will increase. This research develops a human-machine interface for hyper-spectral microscope. The hyper-spectral microscope can scan the specific area of cell and records the data of spectrum and intensity. These data is helpful to diagnose tumor. This research aims to develop a new system and a human-machine interface to control the hyper-spectral microscope. The interface can control the moving speed of motor, the exposure-time of hyper-spectrum, real-time focus, image of fluorescence, and record the data of spectral intensity and position.