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Browsing by Author "Liou, C. H."

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    Design and Fabrication of a Near-field Scanning Optical Microscope Probe by CMOS-MEMS
    (2012)
    Liou, C. H.
    ;
    Chiu, Y.
    ;
    Shieh, H. P. D.
    ;
    Chiou, J. C.
    ;
    電機資訊學士班
    A near-field scanning optical microscope (NSOM) probe based on CMOS-MEMS technology is proposed. The side pin-hole photodetector and the on-chip transimpedance amplifier were characterized. An optical profile measurement by using the fabricated device was performed.