Browsing by Author "Liu, Che Chun"

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Effects of N-2 and O-2 annealing on the multianalyte biosensing characteristics of CeO2-based electrolyte-insulator-semiconductor structures
(2014-04-01)
Kao, Chyuan Haur
;
Chen, Hsiang
;
Lee, Ming Ling
;
Liu, Che Chun
;
Ueng, Herng-Yih
A CeO2-based multi-analyte electrolyte-insulator-semiconductor (EIS) biosensor has been fabricated on silicon substrate. To enhance the material quality and sensing performance, annealing treatment in N-2 and O-2 ambient has been incorporated. To examine the annealing effects, material analyses were conducted using X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM) to identify optimal treatment conditions. Furthermore, sensing performance for various ions of Na+, K+, urea, and glucose has also been tested. Results indicate that the membrane annealed at 800 degrees C in O-2 ambience exhibited a better performance with higher multianalyte sensitivity and a lower drift rate compared with the membrane annealed in N-2 ambience. Oxygen in O-2 ambience may cause stronger reflow and fill in the oxygen vacancy so that the material properties and sensing capability can be improved in O-2 annealing ambience. (C) 2014 Elsevier B.V. All rights reserved.
Multianalyte biosensor based on pH-sensitive ZnO electrolyte-insulator-semiconductor structures
(2014-05-14)
Kao, Chyuan Haur
;
Chen, Hsiang
;
Lee, Ming Ling
;
Liu, Che Chun
;
Ueng, Herng-Yih
Multianalyte electrolyte-insulator-semiconductor (EIS) sensors with a ZnO sensing membrane annealed on silicon substrate for use in pH sensing were fabricated. Material analyses were conducted using X-ray diffraction and atomic force microscopy to identify optimal treatment conditions. Sensing performance for various ions of Na+, K+, urea, and glucose was also tested. Results indicate that an EIS sensor with a ZnO membrane annealed at 600 degrees C exhibited good performance with high sensitivity and a low drift rate compared with all other reported ZnO-based pH sensors. Furthermore, based on well-established pH sensing properties, pH-ion-sensitive field-effect transistor sensors have also been developed for use in detecting urea and glucose ions. ZnO-based EIS sensors show promise for future industrial biosensing applications. (C) 2014 AIP Publishing LLC.
The CeO2 Sensing Membrane in Electrolyte-Insulator-Semiconductor for Bio-Sensor Applications
(2014)
Liu, Che Chun
;
Lee, Ming Ling
;
Chang, Kow Ming
;
Chang, Shan Wei
;
Chen, Hsiang
In the paper, the EIS structure with high-k CeO2 sensing film has more responsive to H+ relative to Na+ and K+. The CeO2 sensing membrane annealed with O-2 at 800 degrees C shows a higher sensitivity of 58.76 mV/pH, higher linearity, lower hysteresis voltage of 5.97 mV and lower drift rate of 0.96 mV/hr than the other conditions.