Browsing by Author "Liu, Chunhui"

Now showing 1 - 2 of 2

Effect of Bridging and Terminal Alkyl Groups on Structural and Mechanical Properties of Porous Organosilicate Films
(2017-01-01)
Nenashev, R.
;
Wang, Yingjie
;
Liu, Chunhui
;
Kotova, N.
;
Vorotilov, K.
Chemical composition, pore structure and mechanical properties of porous organosilicate low-k films with terminal and bridging organic groups are studied. It is shown that BTMSE based low-k films with alkyl bridge between the Si atoms have non-uniform pore structure with internal voids (ink-bottle like pores) while the films with terminal alkyl groups have pores with cylindrical shape. All studied spin-on deposited films have better mechanical properties than PECVD films with similar chemical composition and porosity. The best mechanical properties showed alkyl bridged low-k films. Moreover, the Young's modulus increases with BTMSE content because of higher concentration of bridging bonds. (c) The Author(s) 2017. Published by ECS. All rights reserved.
Properties of organosilicate low-k films with 1,3-and 1,3,5-benzene bridges between Si atoms
(2020-07-01)
Liu, Chunhui
;
Lv, Chunguang
;
Kohler, Nicole
;
Wang, Xuesong
;
Lin, Hongxiao
Organosilicate (OSG) low dielectric constant films containing different concentrations of 1,3- and 1,3,5-benzene bridges between Si atoms are fabricated using 1,3,5-tribromobenzene via spin-on deposition and evaporation induced self-assembling. Chemical composition, pore structure, mechanical, dielectric and hydrophobic properties of as-prepared benzene bridged OSG thin films are studied using nuclear magnetic resonance, Fourier-transform infrared spectroscopy, ellipsometric porosimetry, nanoindentation, CV measurements and water contact angle. The precursors were synthesized by using two methods with the goal of understanding the effect of 1,3,5-benzene concentration on the films properties. It is shown that the films have very small pore size that does not change with porosity. No significant change in mechanical properties was observed at two different ratios of 1,3- and 1,3,5-benzene bridged films. (C) 2020 The Japan Society of Applied Physics