Browsing by Author "Liu, En-Shao"

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Characterization of Si nanorods by spectroscopic ellipsometry with efficient theoretical modeling
(2008-04-01)
Hsu, Shih-Hsin
;
Liu, En-Shao
;
Chang, Yia-Chung
;
Hilfiker, James N.
;
Kim, Young Dong
Spectroscopic ellipsometry (SE) is applied to characterize Si columnar nanostructures. By employing effective medium approximation (EMA) theory, Si nanorods are treated as a graded layer with each sub-layer modeled as a mixture of Si and voids with varying porosity fraction. In addition, the rigorous coupled-wave analysis and finite-element Green's function method were used in modeling Si nanorods as a stack of disks with varying diameters and thicknesses, and the calculations are in satisfactory agreement with the measurement results. (C) 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Low refractive index Si nanopillars on Si substrate
(2007-04-30)
Lin, Gong-Ru
;
Chang, Ya-Chung
;
Liu, En-Shao
;
Kuo, Hao-Chung
;
Lin, Huang-Shen
Low refractive index of a stalagmitelike high-aspect-ratio Si nanopillar array on Si dry etched using a self-aggregated Ni nanodot mask is demonstrated, which exhibits two minimum reflectances of 1.23 and 1.4 with corresponding refractive indices of 1.25 and 1.48 at 400 and 1200 nm, respectively. Angular dependency of the transverse electrical mode reflectance at 632.8 nm of the surface roughened Si nanopillar array is released, and the Brewster angle of 63 degrees with equivalent refractive index of 1.5 is determined. (C) 2007 American Institute of Physics.