Browsing by Author "Mo, TC"

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Physical characteristics of photo-sensitive sol-gel derived PZT films for microcantilever
(2001)
Chen, SY
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Mo, TC
;
Lin, SH
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材料科學與工程學系
;
Department of Materials Science and Engineering
A direct fine-patterning process using photosensitive gel film derived from PZT precursor solution has been used to fabricate the piezoelectric cantilever from lead acetate trihydrate, zirconium n-propoxide and titanium isopropoxide modified with onitrobenzyl alcohol (NBA). Two main heating schedules were used to investigate the effect of various NBA amounts on microstructure, surface morphologies, and electrical properties of PZT films. As NBA was added above 1 wt%, it shows detrimental effect on crystal phase, microstructure evolution and electrical properties of PZT films. With increasing NBA content, both pyrochlore phase and pore formation was promoted. However, prior to next coating, a pre-pyrolysis is required to reduce the pore formation and obtain good piezoelectric characteristics. The mechanical coupling k(31) measured for PZT micro-cantilever is about 0.26 which is comparable to those reported for bulk ceramics.
Physical characterization and electrical properties of chelating-agents added PZT films
(2001)
Mo, TC
;
Chen, SY
;
材料科學與工程學系
;
Department of Materials Science and Engineering
In this study, the chelating agents including ethylene glycol, formamide, glycerol and acetylacetone were used to investigate their effect on perovskite formation, microstructure evolution and electrical properties of PZT films. Two different kind of heating profiles were used for comparison. With fast heating rate, PZT films added with either ethylene glycol or acetylacetone form a dense larger-grained microstructure and show a maximum Pr of similar to31 muC/cm(2). On the other hand, in the heating schedule with a heating rate of 10 degreesC/min, Pr reduction was observed except the glycerol-added PZT films because the addition of glycerol can much reduce the formation temperature of perovskite phase.