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Browsing by Author "OuYang, M"

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    A sensitive Pirani vacuum sensor and the electrothermal SPICE modelling
    (1996-05-01)
    Chou, BCS
    ;
    Chen, YM
    ;
    OuYang, M
    ;
    Shie, JS
    ;
    交大名義發表
    A sensitive micro-Pirani vacuum sensor has been fabricated. With effective schemes of ambient-temperature compensation and stabilization, it is capable of measuring vacuum pressure linearly from 1 torr down to 10(-7) torr, a three orders-of-magnitude improvement in resolution over conventional gauges. A special electrothermal SPICE model, complementary to the conventional analog representation of thermal parameters, is also proposed. It allows a high-level sensor-circuit integrated simulation based on the most fundamental principle and thermal variables. Good agreement between the measured data obtained from a constant-temperature readout circuit and the simulation result is demonstrated.