Browsing by Author "Pan, CS"

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A microstructure for in situ determination of residual strain
(1999-06-01)
Pan, CS
;
Hsu, WY
;
機械工程學系
;
Department of Mechanical Engineering
This work presents a new strain sensor with a compact structure. The strain sensor comprises of a pair of cantilever beams with different lengths connected by a short tip. The residual strain causes two beams to deflect each other, thereby magnifying the deflection, which is measured by the tip. The displacement is independent of both Young's modulus and the film's thickness. An analytical model is derived to relate the measured displacement to residual strain. Finite-element modeling is also used to analyze the model. This work also thoroughly considers other factors that influence the designs and the implicit limitations of the strain sensors. Experimental results with an SiO2 film as well as undoped LPCVD polysilicon films are used to demonstrate the effectiveness of the proposed structure.
An electro-thermally and laterally driven polysilicon microactuator
(1997-03-01)
Pan, CS
;
Hsu, WY
;
機械工程學系
;
Department of Mechanical Engineering
A novel electro-thermally and laterally driven microactuator made of polysilicon has been designed, fabricated, and tested. The operational principle is based on the asymmetrical thermal expansion of the microstructure with different lengths of two beams, but not based on the variable cross sections of the microstructure. A microgripper to demonstrate one possible application of the microactuator is fabricated and characterized. The input voltage of this design is less than 10 dc to produce 20 mu m displacement with about 0.6 mJ heat dissipation, and the maximum temperature is less than 600 degrees C. A gripping force up to 2.8 mu N can be generated. Simulation results are compared with the experimental data and show good agreement. Some design parameters strongly influencing the performance of the microactuator are discussed also.