Browsing by Author "SHIE, JS"

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A REVOLVING RETRO-REFLECTIVE MARKER FOR AN OPTICAL TACHOMETER
(1990-09-01)
WENG, PK
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SHIE, JS
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交大名義發表
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光電工程學系
;
National Chiao Tung University
A new tachometric marker with a surface consisting of right-angle V grooves has been made by the silicon micromachining technique. Anisotropic etching on a (001) silicon surface by three conventional recipes has been adopted. The results of the etched qualities are compared; hydrazine hydrate and potassium hydroxide-isopropanol-water solutions can give good quality right-angle V grooves. The revolving retro-reflection effect associated with this marker is described. When placed on a rotating plane, it can be utilized for wide-angle and remote tachometric measurements, where proximity measurements are either impossible or dangerous.
A TEMPORALLY RESOLVED POSITION SENSING DEVICE FOR AUTOFOCUSING
(1991-03-01)
SHIE, JS
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CHANG, GD
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交大名義發表
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光電工程學系
;
National Chiao Tung University
A position-sensing method for autofocus purpose is demonstrated, based on the triangular ranging principle applied to a photoconductive Haynes-Shockley device. This method provides a linear variation of the minority-carrier transit time in the sensor with respect to the inverse of the object distance, or to the image distance to be adjusted from the focal point. Hence it can provide a convenient autofocusing control with a fully digital signal processing circuit. The principle of the autofocus triangular ranging is justified, and its resolution is analyzed with a p-type silicon photoconductor. The result shows that our method indeed can provide a high resolution and practically low cost autofocusing device for the camera industry.
AQUEOUS PHOTOLITHOGRAPHIC ETCHING OF TGS
(1983)
WANG, DC
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SHIE, JS
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CHEN, SH
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交大名義發表
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光電工程學系
CALCULATION OF THE PEIERLS BARRIER WITH A TENSION-FRENKEL-KONTOROVA MODEL
(1981-01-01)
SHIE, JS
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HSIAO, KM
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電子工程學系及電子研究所
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Department of Electronics Engineering and Institute of Electronics
CONTROL APPARATUS FOR SINGLE-CRYSTAL GROWTH IN AQUEOUS-SOLUTION METHOD
(1994-03-01)
SHIE, JS
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HUANG, CT
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交大名義發表
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光電工程學系
;
National Chiao Tung University
A new technique has been developed for controlling the crystal-growth rate in the aqueous solution method. This technique provides a programmable preset of the temperature evolution of solution. Initially, the growth rate is kept slow to ensure good crystal quality. Gradually the rate is accelerated to increase the growth efficiency. A simple control mechanism is devised to achieve a very slow and pre-determined cooling rate, which can be adapted to the temperature-related characteristics of various solutions and thermistor sensor. Single crystal growth of KDP has been demonstrated. The result verifies our prediction that a linear growth rate of the crystal dimension with a good seed-to-grown crystal interface can be obtained programmatically.
DESIGN CONSIDERATIONS OF METAL-FILM BOLOMETER WITH MICROMACHINED FLOATING MEMBRANE
(1992-06-01)
SHIE, JS
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WENG, PK
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交大名義發表
;
光電工程學系
;
National Chiao Tung University
A metal-film microbolometer formed on a glass membrane suspended on a silicon substrate has been fabricated by the anisotropic etching technique. The rectangular glass membrane is supported by its four leads connected to the corners of an etched V-groove cavity. This structure allows flexible thermal management and sensitivity optimization of the bolometer for different kinds of application, with a trade-off between lead thermal impedance and device active area. Optimizations of the structure applied to both a focal-plane array and a single detector are interpreted. A thermal impedance as high as 4 x 10(5)-degrees-C/W with a response time of several milliseconds can be achieved. For a 320-mu-m x 320-mu-m detector, theoretical predictions give a responsivity and normalized detectivity of over 700 V/W and 10(9) cm square-root Hz/W, respectively. For dimensions of 128-mu-m x 128-mu-m, suitable for a focal-plane-array detector, theory predicts a D* of 5.5 x 10(8). A discrepancy exists between the experiment and the theory, which is also discussed.
ELECTRICAL-PROPERTIES OF INSB METAL-INSULATOR SEMICONDUCTOR DIODES PREPARED BY PHOTOCHEMICAL VAPOR-DEPOSITION
(1987-08-03)
HUANG, KF
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SHIE, JS
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LUO, JJ
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CHEN, JS
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交大名義發表
HIGH-PERFORMANCE PIRANI VACUUM GAUGE
(1995-11-01)
SHIE, JS
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CHOU, BCS
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CHEN, YM
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交大名義發表
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光電工程學系
As an extension of previous work in our laboratory, a wide-range Pirani gauge that is capable of measuring vacuum pressure down to 10(-7) Torr reproducibly has been built, The micromachined Pirani sensor used in the experiments has a suspended membrane that is supported by the nearly radiation-limited, thermally insulating beam leads crossing over a V-groove cavity. A method of partial dummy compensation, as proposed previously by Weng and Shie for eliminating the ambient drift, is proved here to be very effective with a thermal drift as small as only 5.7 mu V/degrees C. It has also been found that a thermal-stress-induced piezoresistive effect, which has a profound influence on the limitation of measurement, appears in the constant-bias operation wherein the sensor temperature rises with the reduction of gas pressure and therefore thermal conduction. This effect causes the irreproducibility of pressure measurements by the device below 10(-5) Torr. In addition to its inherently higher sensitivity, a constant-temperature circuit together with a thermoelectric stabilization of the sensor substrate temperature can eliminate the induced piezoresistive error. The constant-temperature circuit operating on the micro-Pirani sensor together with the above-mentioned temperature compensation and the stabilization methods have extended gauge capability down to 10(-7) Torr, which is only limited by the signal readout resolution (similar to 1 mu V). This is three orders of magnitude more sensitive than the conventional vacuum gauges of the thermal conductivity type. (C) 1995 American Vacuum Society
MICRO-PIRANI VACUUM GAUGE
(1994-02-01)
WENG, PK
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SHIE, JS
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交大名義發表
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光電工程學系
;
National Chiao Tung University
A Pirani vacuum sensor has been fabricated by the silicon micromachining technique. A square glass membrane was formed on (100) silicon substrate with a platinum-film resistor coated. The membrane is suspended by its four leads extended to the corners of an etched cavity. This structure can provide both low thermal loss through leads to the substrate and large active area for gaseous heat conduction. It thus can be used as a highly sensitive vacuum sensor. The fabricated sensor has shown a linear response of pressure from 8X10(-5) to 6 Torr with constant-temperature operation. It is found that the low-pressure limit of the vacuum sensor was caused by the noise of the instrument used in the experiment. A new terminology called ''noise equivalent pressure'' thus is definable due to this finding. The physical limit of the noise equivalent pressure is analyzed. Optimization of the device structure and the noise equivalent pressure are also discussed in detail. A new method of ambient-temperature compensation is also proposed and analyzed here.
QUANTUM-THEORY OF LIGHT-INTERSTITIAL HOPPING
(1984-01-01)
SHIE, JS
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電子物理學系
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Department of Electrophysics
REACTION-TEMPERATURE AND QUENCHING EFFECTS ON THE ULTRAFINE PARTICLE-SIZE OF PYROLYZED BATIO3
(1981)
SHIE, JS
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FANN, RH
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交大名義發表
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電控工程研究所
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National Chiao Tung University
SELF-DIRECTIONING WITH THE REVOLVING RETROREFLECTION TECHNIQUE
(1992-08-01)
WENG, PK
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SHIE, JS
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交大名義發表
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光電工程學系
;
National Chiao Tung University
We have developed a method for giving direction and/or position information in an optical guidance system based on the pulse position modulation property of a reflected light pulse train from a revolving retroreflector. The principle and theoretical analysis are described. Experimental verification of the one-axis, closed-loop tracking system is presented, which resulted in a static angular resolution as low as 22-mu-rad. This method suggests some potential applications to coordinate determinations or line-of-sight guidance systems.