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Browsing by Author "SI-HAN TSAI"

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    METHOD FOR MANUFACTURING WIDE-BANDGAP OXIDE EPITAXIAL FILM
    (2019-03-14)
    RAY-HUA HORNG
    ;
    YEN-CHU LI
    ;
    CHUN-YI TUNG
    ;
    SI-HAN TSAI
    ;
    LI-CHUNG CHENG
    The present invention provides a method for manufacturing a wide-bandgap oxide epitaxial film. An epitaxial film with superior physical properties, such as high saturated drift velocity of electrons, small dielectric constant, high thermal stability, and excellent high-temperature resistance, is formed on a substrate. In addition, because the oxide epitaxial film is grown by metal-organic chemical vapor deposition (MOCVD), the yield is improved significantly and defects in the epitaxy is reduced.
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    SOLAR-BLIND DETECTING DEVICE WITH WIDE-BANDGAP OXIDE
    (2019-03-14)
    RAY-HUA HORNG
    ;
    YEN-CHU LI
    ;
    CHUN-YI TUNG
    ;
    SI-HAN TSAI
    ;
    LI-CHUNG CHENG
    The present invention provides a solar-blind detecting device with a wide-bandgap oxide, which comprises an oxide epitaxial sensing layer disposed on a substrate for improving the property as well as substantially increasing the photocurrent in the oxide epitaxial sensing layer under the stimulation of ultraviolet light. Particularly, the sensing performance for the deep ultraviolet region (200˜280 nanometers) is enhanced significantly.