Browsing by Author "Sheih, BS"

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A new simple and reliable method to form a textured Si surface for the fabrication of a tunnel oxide film
(1998-05-01)
Chang, KM
;
Li, CH
;
Sheih, BS
;
Yang, JY
;
Wang, SW
In this work, a textured Si surface was formed with a new simple and reliable method for tunnel oxide fabrication. First, a thin poly-Si layer (12 nm thick) was deposited on Si surface and a 30-nm thick dry oxide film was then grown in O-2 ambient. This oxide film was served as a sacrificial oxide. The poly-Si film and Si substrate were both oxidized during thermal oxidization. After stripping this sacrificial oxide, a textured Si surface was obtained. Tunnel oxide grown on this textured Si surface has an asymmetrical J-E characteristics, less interface states generation and better reliability (larger Q(bd)) as compared to those of normal oxide.