Browsing by Author "Shih, Yu-Tai"

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A new hybrid method for H2S-sensitive devices using WO3-based film and ACF interconnect
(2013-07-01)
Kuo, Li Min
;
Shih, Yu-Tai
;
Wu, Cen-Shawn
;
Lin, Yu-Chi
;
Chao, Shuchi
A new hybrid integration method has been reported for process simplification of conventional metal-oxide sensors with a gold (Au) dopant-like catalyst during hydrogen sulfide (H2S) gas detections at room temperature. Different from conventional fabrications, an anisotropic conduction film (ACF) followed by a sputtered tungsten oxide (WO3) film tapped on Cu electrodes has been utilized in consumer applications. The process steps were reduced without compromising electrical performances. The treated ACF with a thin WO3 film, coated across two closely spaced microelectrodes is employed as the H2S solid-state sensor at room temperature. Apart from exhibiting good interconnects as conductive bumps, Au dopant-like catalyst within ACF will also produce a lower barrier between the bands of electronics, and therefore improve the electrical conductivity significantly. Our integration method offers a number of merits, including high sensitivity to the reference gas, lead-free bonding connection, low-temperature fabrication, high throughput and less fabrication time.
Electrolyte-Free, H2S-Sensitive Microdiode Using a WO3/IrO2 Junction and Au Catalyst
(2013-10-01)
Kuo, Li Min
;
Shih, Yu-Tai
;
Wu, Cen-Shawn
;
Su, Chin-Yu
;
Chao, Shuchi
The H2S gas sensing performance based on a WO3/IrO2 diode assisted by gold (Au)-catalyst is investigated. Intermolecular force, similar to Van Der Waal interaction, initiates interstitial-water in IrO2 film to be H+-dipoled permanently. H+ and e(-) produce reversible redox reactions, which control conductivity by utilizing proton-electron double injection. As a result of the catalysis contributed from Au dopant-like particles distributed uniformly on the microdiode bulk surface, the barrier height between the surface of WO3-based microdiode and the reference gas molecules will be decreased in response upon exposure to H2S gas and therefore improve conductometric change significantly. The preliminary dc analysis of the microdiode has revealed repeatable and durable results. Such a microdiode can work stably for a long time without significant signal deterioration.