Browsing by Author "Shih, Yung-Hui"

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The effects of annealing temperature and sputtering power on the structure and magnetic properties of the Co-Fe-Zr-B thin films
(2012-11-01)
Chen, Guo-Ju
;
Jian, Sheng-Rui
;
Jang, Jason Shian-Ching
;
Shih, Yung-Hui
;
Chen, Yuan-Tsung
The microstructure and magnetic properties of the amorphous Co-Fe-Zr-B thin films grown on glass substrates by dc magnetron sputtering are investigated using differential scanning calorimetry (DSC), transmission electron microscopy (TEM), and superconducting quantum interference device (SQUID) techniques. The Co-Fe-Zr-B thin films deposited at room temperature were annealed at temperatures ranged from 683 K to 773 K. Experimental results indicated that the coercivity (H-c) of the Co-Fe-Zr-B thin films is significantly influenced by residual stress and crystalline phases within the films. The correlation of the coercivity and the microstructure of Co-Fe-Zr-B thin films are discussed. After annealed at 683 K, the coercivity of the Co-Fe-Zr-B film was as low as 1.2 Oe. (C) 2012 Elsevier Ltd. All rights reserved.