Browsing by Author "Su, CW"

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A trap generation closed-form statistical model for intrinsic oxide breakdown
(2001-06-01)
Huang, HT
;
Chen, MJ
;
Su, CW
;
Chen, JH
;
Hou, CS
A trap generation statistical model with the trap sphere radius r as parameter has been newly formulated in closed-form for intrinsic breakdown of ultrathin oxides and, by incorporating the trap filling fraction p as the secondary parameter, can be practically useful in a manufacturing process. Experimental reproduction for different oxide thicknesses and areas has been achieved through the model. A certain criterion has readily been drawn from the model, with which the ultimate thickness limit for breakdown can be set.
Monte Carlo sphere model for effective oxide thinning induced extrinsic breakdown
(2000-04-01)
Huang, HT
;
Chen, MJ
;
Chen, JH
;
Su, CW
;
Hou, CS
The Monte Carlo sphere model is extended to deal with the extrinsic time-dependent-dielectric-breakdown (TCDB) by incorporating the well-known "effective oxide thinning" concept. Percolation simulation, based on this model for the first time, evidences that the process defects induced extrinsic TDDB is also statistical in nature as is the intrinsic one, and is characterized by a probability function defining local oxide thinning. The experimental bimodal or even multimodal characteristics can be reproduced accordingly. Furthermore, the simulation results in the extrinsic regime are found to be sample-size (i.e., the total number of samples that span the breakdown statistics) dependent, suggesting that care should be taken when evaluating the extrinsic TDDB data in a real manufacturing process.