Browsing by Author "Su, S"

Now showing 1 - 3 of 3

Fabrication of intermediate mask for deep x-ray lithography
(1998-02-01)
Sheu, JT
;
Chiang, MH
;
Su, S
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
This paper presents the fabrication of intermediate x-ray mask for deep x-ray lithography. In order to have working mask with absorbers thickness larger than 10 mu m, the intermediate mask should have absorbers of 0.7 mu m in thickness. To demonstrate intermediate mask fabrication, x-ray zone plates are fabricated on the 1.2 mu m low-stress silicon-rich silicon nitride (SiNx) membrane with the tri-layer Chromium-Tungsten-Chromium (Cr-W-Cr) as the x-ray absorbers. The chromium layers both 200 angstroms are used as adhesion and for stress relief. The SiNx film is deposited with low pressure chemical vapor deposition (LPCVD) and the free standing membrane are formed by KOH silicon backside etching. With the e-beam Lithography and reactive ion etching, width of 0.8 mu m of outmost zone of the x-ray zone plates has been achieved on the membrane, The scanning electron microscopy (SEM) images of the x-ray zone plates and pictures of intermediate masks are demonstrated.
Short leaky-wave antennas of sum and difference patterns
(1996-07-04)
Lin, JM
;
Tzuang, CKC
;
Chou, GJ
;
Su, S
;
交大名義發表
A set of differential feed short (similar to 0.7 lambda(0)) leaky-wave antennas with sum (Sigma) and difference (Delta) patterns is presented. Rigorous field-theory analyses show that the radiation characteristics of these antennas agree well with the measurements. The performance of these antennas is well suited for direction finding applications.
Short leaky-wave antennas of sum and difference patterns
(1996-07-04)
Lin, JM
;
Tzuang, CKC
;
Chou, GJ
;
Su, S
;
電信工程研究所
A set of differential feed short (similar to 0.7 lambda(0)) leaky-wave antennas with sum (Sigma) and difference (Delta) patterns is presented. Rigorous field-theory analyses show that the radiation characteristics of these antennas agree well with the measurements. The performance of these antennas is well suited for direction finding applications.