Browsing by Author "Ting, Yen-Yu"

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Nano- to atomic-scale epitaxial aluminum films on Si substrate grown by molecular beam epitaxy
(2019-10-01)
Tsai, Yi-Hsun
;
Wu, Yu-Hsun
;
Ting, Yen-Yu
;
Wu, Chu-Chun
;
Wu, Jenq-Shinn
We demonstrate nano-to atomic-scale epitaxial aluminum film growth on Si(111) substrate by molecular beam epitaxy. Excellent quality of these aluminum films, including sub-nanometer surface roughness, narrow linewidth of X-ray diffraction peak, clear transmission electron diffraction, and high optical reflectivity in ultra-violet, have been obtained with a reproducible growth recipe. The atomic-scale metallic aluminum film is formed by the self-limiting oxidation on the 3-nm-thick sample in air and the metallic state is confirmed with X-ray photoemission spectroscopy. Our work paves the way to future integration of aluminum-based plasmonic and superconducting devices on Si platform. (c) 2019 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).