Browsing by Author "Tong, L"

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Constructing control process for wafer defects using data mining technique
(2004)
Tong, L
;
Lee, H
;
Huang, CF
;
Lin, CK
;
Yang, CH
The wafer defects influence the yield of a wafer. The integrated circuits (IC) manufacturers usually use a Poisson distribution based c-chart to monitor the lot-to-lot wafer defects. As the wafer size increases, defects on wafer tend to cluster. When the c-chart is used, the clustered defects frequently cause erroneous results. The main objective of this study is to develop a hierarchical adaptive control process to monitor the clustered defects effectively and detect the wafer-to-wafer variation and lot-to-lot variation simultaneously using data mining technique.