Browsing by Author "Tsai, RJ"

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Nitride-based LEDs with nano-scale textured sidewalls using natural lithography
(2006-06-28)
Huang, HW
;
Kuo, HC
;
Chu, JT
;
Lai, CF
;
Kao, CC
This investigation describes the development of a InGaN/GaN light-emitting diode (LED) with textured sidewalls using natural lithography with polystyrene spheres (PSs) as the etching mask and dry etching the epitaxial layers of LEDs to achieve nano-scale textured sidewalls. The LED with textured sidewalls increased the output power of the InGaN - GaN multiple quantum well (MQW) LEDs by a factor of 1.3, indicating that the LED with nano-scale textured sidewalls had larger light extraction efficiency. The wall-plug efficiency of nitride-based LEDs was increased by 30% using textured sidewalls.