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Browsing by Author "Tseng, Fan-Shin"

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    Development of stable micro-crystalline silicon AMLCD
    (2007-01-01)
    Chang, Chan-Ching
    ;
    Chen, Chih-Hsien
    ;
    Peng, Ya-Hui
    ;
    Lee, Yeong-Shyang
    ;
    Hou, Chih-Yuan
    Bottom-gate microcrystalline silicon thin film transistors (mu c-Si TFTs) have been produced by the radio frequency glow discharge technique using three different plasma treatment on the interface between microcrystalline and SiN layers. Our first microcrystalline silicon TFTs have better stability at high temperature stress.