Browsing by Author "Tseng, Hsuan-Tzu"

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A New Procedure to Extract Ultra-Low Specific Contact Resistivity
(2012)
Tseng, Hsuan-Tzu
;
Tsui, Bing-Yue
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
In this work, a new procedure to extract ultra-low specific contact resistivity down to 10(-9) Omega-cm(2) is proposed. Design guidelines of the test structure are analyzed with 3-D simulation. Compared to the typical Cross-bridge-Kelvin resistor structure, the proposed structure has much better accuracy at low resistivity regime, looser design rules, simpler fabrication process.
Evaluation of Ultra-low Specific Contact Resistance Extraction by Cross-Bridge Kelvin Resistor Structure and Transmission Line Method Structure
(2014-01-01)
Tsui, Bing-Yue
;
Tseng, Hsuan-Tzu
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
This work evaluates the accuracy of the specific contact resistance extraction by the cross-bridge Kelvin resistor (CBKR) structure and the self-aligned transmission line method (mTLM) structure considering three-dimensional effect. The mTLM structure is more accurate than the CBKR structure in theory but more sensitive to process variation. The sensitivity to process variation could be suppressed by averaging large amount data. Nevertheless, the recessed contact interface would underestimate the true specific contact resistance and would cause complicated extraction problem for both test structures as the contact resistivity becomes less than 10(-8) ohm-cm(2).