Browsing by Author "Tu, Yen-Wei"

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Oxygen Plasma Functioning of Charge Carrier Density in Zinc Oxide Thin-Film Transistors
(2013-07-01)
Chu, Min-Ching
;
Meena, Jagan Singh
;
Liu, Po-Tsun
;
Shieh, Han-Ping D.
;
You, Hsin-Chiang
A change in the charge carrier density of zinc oxide (ZnO) films for control the functioning of thin-film transistors (TFTs) has been studied by oxygen (O-2) plasma techniques. This effect was interpreted in terms of a threshold voltage shift and the variation in carrier mobility. The plasma-surface interaction on the molecular level and the behavioral characterization of ZnO films were investigated by X-ray photospectroscopy of the O 1s region. This process was highly sensitive at low level variations in defect and doping density. O-2 plasma treatment leads to a shift of turn-on voltage and a reduction of the off-current by more than two orders of magnitude in ZnO-TFTs. (C) 2013 The Japan Society of Applied Physics