Browsing by Author "Wang, Fang-Hsing"

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Gate-All-Around Poly-Si TFTs With Single-Crystal-Like Nanowire Channels
(2011-09-01)
Kang, Tsung-Kuei
;
Liao, Ta-Chuan
;
Lin, Chia-Min
;
Liu, Han-Wen
;
Wang, Fang-Hsing
The gate-all-around (GAA) poly-Si thin-film transistors (TFTs) with single-crystal-like nanowire (NW) channels (SCLNCs) are demonstrated and characterized. Via the nanoscale nitride spacer, the Si NW can be easily transformed within one crystalline grain of the two-shot sequential-lateral-solidification poly-Si film. As compared with the planar ones, the GAA-SCLNC TFTs showed more excellent characteristics. The results clearly show that the variations of device characteristics can be reduced by increasing the numbers of NWs in the channels and an average mobility above 410 cm(2)/V . s with a low standard deviation can be achieved for the GAA-SCLNC TFTs with 20-NW channels.
Improved characteristics for Pd nanocrystal memory with stacked HfAlO-SiO(2) tunnel layer
(2011-07-01)
Kang, Tsung-Kuei
;
Liu, Han-Wen
;
Wang, Fang-Hsing
;
Lin, Cheng-Li
;
Liao, Ta-Chuan
Stacked HfAlO-SiO(2) tunnel layers are designed for Pd nanocrystal nonvolatile memories. For the sample with 1.5 nm-HfAlO/3.5 nm-SiO(2) tunnel layer, a smaller initial memory window is obtained compared to the sample with 3.5 nm-HfAlO/1.5 nm-SiO(2) tunnel layer. Owing to the thermally induced traps in HfAlO-SiO(2) films are located at a farther distance from the Si substrate and more effective blocking of charge leakage by asymmetric tunnel barrier, a larger final memory window and better retention characteristic can be obtained for Al/blocking oxide SiO(2)/Pd NC5/1.5 nm-HfAlO/3.5 nm-SiO(2)/Si structure. A N(2) plasma treatment can further improve the memory characteristics. Better memory characteristics can be obtained for Pd-nanocrystal-based nonvolatile memory with an adequate thickness ratio of HfAlO to SiO(2). (C) 2011 Elsevier Ltd. All rights reserved.
Improved characteristics for Pd nanocrystal memory with stacked HfAlO-SiO2 tunnel layer
(2011-07-01)
Kang, Tsung-Kuei
;
Liu, Han-Wen
;
Wang, Fang-Hsing
;
Lin, Cheng-Li
;
Liao, Ta-Chuan
Stacked HfAlO-SiO2 tunnel layers are designed for Pd nanocrystal nonvolatile memories. For the sample with 1.5 nm-HfAlO/3.5 nm-SiO2 tunnel layer, a smaller initial memory window is obtained compared to the sample with 3.5 nm-HfAlO/1.5 nm-SiO2 tunnel layer. Owing to the thermally induced traps in HfAlO-SiO2 films are located at a farther distance from the Si substrate and more effective blocking of charge leakage by asymmetric tunnel barrier, a larger final memory window and better retention characteristic can be obtained for Al/blocking oxide SiO2/Pd NC5/1.5 nm-HfAlO/3.5 nm-SiO2/Si structure. A N-2 plasma treatment can further improve the memory characteristics. Better memory characteristics can be obtained for Pd-nanocrystal-based nonvolatile memory with an adequate thickness ratio of HfAlO to SiO2. (C) 2011 Elsevier Ltd. All rights reserved.