Browsing by Author "Wang, M. H."

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Surface Potential and Electric Field Mapping of p-well/n-well Junction by Secondary Electron Potential Contrast and in-situ Nanoprobe biasing
(2012-01-01)
Lee, Jeng-Han
;
Liu, Po-Tsun
;
Wang, M. H.
;
Lin, Y. T.
;
Huan, Y. S.
This study investigates the p-well/n-well junction by using secondary electron potential contrast (SEPC) with in-situ nanoprobe biasing. Experimental result demonstrated dopant contrast is restored after applying electricity in the junction nodes. Furthermore, the image contrast was converted to a voltage scale, allowing the junction surface potential and electric filed distribution to be identified. The proposed method demonstrates that an in-situ nanoprobe system is powerful in dopant area inspection in SEM, potentially contributing to an efficient method in analyzing site-specific failure in real circuits.