Browsing by Author "Wang, Xiaoyi"

Now showing 1 - 2 of 2

A CMOS-MEMS Thermoresistive Micro Calorimetric Flow Sensor With Temperature Compensation
(2019-10-01)
Xu, Wei
;
Ma, Shenhui
;
Wang, Xiaoyi
;
Chiu, Yi
;
Lee, Yi-Kuen
In this paper, we propose a new 1D thermoresistive micro calorimetric flow (TMCF) sensor model for moist airflow with the temperature-dependent thermophysical properties. The 1D model and the corresponding proposed equivalent circuit model enable rapid design optimization of an ambient temperature-compensated TMCF ((TMCF)-M-2) sensor integrated with the interface circuit by using a commercial 0.35-mu m 2P4M CMOS MEMS technology. The fabricated sensor shows a prominent sensitivity of 0.543 V/(m/s) and a low power consumption of less than 2.8 mW. Moreover, in comparison with the large drifting of 49% for the uncompensated TMCF sensor, the (TMCF)-M-2 sensor's output has an ultralow drifting of 0.5% with the ambient temperature variation of 22 degrees C similar to 48 degrees C. Therefore, this robust (TMCF)-M-2 sensor can be a promising Internet of Things (IoT) for smart energy-efficient buildings.
High Sensitivity and Wide Dynamic Range Thermoresistive Micro Calorimetric Flow Sensor With CMOS MEMS Technology
(2020-04-15)
Xu, Wei
;
Wang, Xiaoyi
;
Chiu, Yi
;
Lee, Yi-Kuen
;
電機工程學系
In this paper, a thin film based Thermoresistive Micro Calorimetric Flow (TMCF) sensor by using a 0.35 mu m 2P4M CMOS MEMS technology is designed, fabricated and tested. The developed 1.6 mu m thick thin film CMOS TMCF sensor shows a maximum normalized sensitivity of 103 mV/(m/s)/mW with respect to the input heating power and a wide dynamic flow range of 0 similar to 19.4 m/s. The high sensitivity and wide dynamic range achieved by our CMOS MEMS flow sensor enable its deployment as a promising sensing node for HVAC application in the smart energy-efficient building (EeB). Moreover, a new one-dimensional (1D) analytical sensor model that considers the three-dimensional (3D) heat loss via the end of the thin film is proposed. The new 1D model can successfully capture the thin film based TMCF sensor's response, and its prediction results show a good agreement with the experimental study. Therefore, this new 1D model will be a useful design tool for the development of a high-performance TMCF sensor with a greatly reduced footprint.