Browsing by Author "Wang, Y"

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Effect of carrier gas on the structure and electrical properties of low dielectric constant SiCOH film using trimethylsilane prepared by plasma enhanced chemical vapor deposition
(2004-12-22)
Cheng, YL
;
Wang, Y
;
Lan, JK
;
Chen, HC
;
Lin, JH
For a low dielectric constant inter-metal dielectric application, the low-k SiCOH film with a dielectric constant of 2.8-3.2 has been deposited by plasma-enhanced chemical vapor deposition (PE-CVD) with trimethylsilane (3MS), oxygen, and the carrier gas. In this work, we present the effects of the carrier gas on the characterizations of the low-k films, including reaction mechanism, the deposition rate, and the mechanical and electrical properties. According to the experimental results, the low-k film in Ar carrier gas exhibits the improvement in deposition rate, nonuniformity, leakage current, and hardness. In addition, the dielectric constant of the deposited low-k film is slightly sacrificed due to the decrease of micropores in the deposited films. (C) 2004 Elsevier B.V. All rights reserved.
Melt processing of polypropylene/clay nanocomposites modified with maleated polypropylene compatibilizers
(2004)
Wang, Y
;
Chen, FB
;
Li, YC
;
Wu, KC
;
應用化學系
Maleic arthydride-grafted polypropylene (PPgMA) and organically modified clay composites were prepared in a plasticorder. PPgMAs, including PB3150, PB3200, PB3000, and E43, with a wide range of MA content and molecular weight were used. The structure was investigated with X-ray diffraction (XRD) and transmission electron microscopy (TEM). PPgMA compatibilizers gave rise to similar degree of dispersion beyond the weight ratio of 3 to 1 with the exception of E43, which had the highest MA content and the lowest molecular weight. It was found that thermal instability and high melt index were responsible for ineffective modification by E43. Furthermore, PPgMA with low melting point and high melt index was compounded at low equilibrium temperature in order to maintain a certain level of torque. We then modified polypropylene/organoclay nanocomposites with different levels of PPgMA compatibilizers on a twin-screw extruder. The PP/E43/clay system, as shown through XRD patterns and TEM observation, yielded the poorest clay dispersion among the compatibilizers under investigation. The relative complex viscosity curves also revealed a systematic trend with the extent of exfoliation and showed promise for quantifying the hybrid structure of the nanocomposites. Mechanical properties and thermal stability were determined by dynamical mechanical analysis and thermogravimetric analysis, respectively. Though PPgMA with lower molecular weight and higher MA content could lead to good clay dispersion in PP/clay composites, it caused the deterioration in both mechanical and thermal properties of PP/PPgMA/clay composites. (C) 2003 Elsevier Ltd. All fights reserved.