Browsing by Author "Wu, Sheng-Wei"

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Enhancement of Open-Circuit Voltage Using CF4 Plasma Treatment on Nitric Acid Oxides
(2013-05-01)
Lin, Je-Wei
;
Wu, Chien-Hung
;
Wu, Sheng-Wei
;
Hseih, Wei-Ping
;
Du, Chen-Hsu
Surface passivation of solar cells is investigated using CF4 plasma treatment on low-temperature oxides to enhance the open-circuit voltage of the solar cells. Low-temperature oxides grown by a nitric acid solution are treated with the CF4 plasma. Solar cells undergoing this scheme show an improved performance, including low-saturation current density and good quantum efficiency at short wavelengths. Experimental results demonstrate that the CF4 plasma pretreatment on low-temperature oxides can significantly improve the open-circuit voltage, short-circuit current, and fill factor for silicon wafer-based solar cells. This technique is very promising for in-line solar cell manufacturing.