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Browsing by Author "YEN, YT"

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    POLY-OXIDE POLY-SI/SIO2/SI STRUCTURE FOR ELLIPSOMETRY MEASUREMENT
    (1992-06-04)
    CHAO, TS
    ;
    LEE, CL
    ;
    LEI, TF
    ;
    YEN, YT
    ;
    電子工程學系及電子研究所
    A multiple poly-oxide/poly-Si/SiO2/Si sandwiched structure is proposed for the conventional single incident angle and single wavelength ellipsometry measurement of the thicknesses and refractive indices of the poly-oxide and the poly-Si at the same time. The structure is simple and gives accurate results.