Browsing by Author "YU, JL"
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Item type:Item, DIFLUOROSILYLENE AS A PRECURSOR FOR THE CHEMICAL VAPOR-DEPOSITION OF TITANIUM SILICIDE(1992-09-01) ;CHEN, CC ;YU, JL ;LEE, CY ;LIU, CSCHIU, HTA new method for preparing thin films of titanium silicide, TiSi2, by chemical vapour deposition of difluorosilylene and titanium tetrachloride is reported.