Browsing by Author "Yang, Yu-Jen"

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Free-standing a-plane GaN substrates grown by HVPE
(2012)
Wu, Yin-Hao
;
Yeh, Yen-Hsien
;
Chen, Kuei-Ming
;
Yang, Yu-Jen
;
Lee, Wei-I
A-plane free-standing GaN was grown on a-plane GaN templates by HVPE. A-plane GaN templates were grown on r-plane sapphire by MOCVD with multilayer high-low-high temperature AlN buffer layers. A regrowth method was used for growing GaN through HVPE. First, GaN was grown on a-plane GaN templates, followed by separating the a-plane GaN film from r-plane sapphire using LLO. Then, the GaN films were regrown using HVPE. The resulting free-standing GaN contained some voids, which causes to release the stress.