Browsing by Author "Yeh, S. D."

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A gasket-type standard leak element using femtosecond laser micromachining
(2020-10-01)
Chan, C. K.
;
Tu, C. Y.
;
Yeh, S. D.
;
Chang, C. C.
;
Lin, T. C.
A gasket-type standard leak element with a microfluidic channel was developed and measured. The microfluidic channel with a diameter of several micrometers and a length of one hundred micrometers was fabricated by using femtosecond laser micromachining. The conductances (<1 x 10(-6) L s(-1)) of the micmfluidic channel for various non-condensable gases - H-2, He, CH4, N-2 and CO2 were determined by a measuring system based on conductance modulation (CM) method. The experimental results show that the flow characteristics of our devices exhibit molecular flow at a pressure up to 100 mbar and the conductance values of H-2, He, CH4, N-2 and CO2 are inversely proportional to the square root of their molecular mass.