Browsing by Author "Yeh, ZH"

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Self-aligned platinum-silicide nanowires for biomolecule sensing
(2005-11-01)
Ko, FH
;
Yeh, ZH
;
Chen, CC
;
Liu, TF
;
材料科學與工程學系奈米科技碩博班
A self-aligned platinum-silicide nanowire for biomolecule sensing is developed in this work, The 40 nm nanowire is fabricated through a sequence of electron-beam writing on the polysilicon film, line shrinkage with alkaline solution, platinum film deposition, 550 degrees C annealing, and aqua regia dissolution. The immobilization of single-stranded capture DNA onto the platinum-silicide nanowire is verified from the fluorescence-labeled technique, The field-effect transistor can distinguish the complementary, mismatched, and denatured DNA via the conductance difference. Although the nanowire sensor has not been integrated into a fluid channel system, we can sense the minimal target DNA concentration down to 100 fM, and the signal is still 1000-fold larger than the noise signal. (c) 2005 American Vacuum Society.