Browsing by Author "Yen-Ying LIN"
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Item type:Item, METHOD FOR PARAMETER EXTRACTION OF A SEMICONDUCTOR DEVICE(2017-08-24) ;Jyh-Chyurn GUOYen-Ying LINA method is provided for parameter extraction of a semiconductor device with a multi-finger gate. The method includes measuring gate-to-source and gate-to-drain capacitances and performing 3D simulation to compute fringing capacitances, thereby computing an overlap capacitance between the gate and a source/drain extension region, and computing a length of the source/drain extension region according to the overlap capacitance.