Browsing by Author "Yu, Ming-Hue"

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Grain Size and Plasma Doping Effects on CVD-based 2D Transition Metal Dichalcogenide
(2016)
Lin, Chih-Pin
;
Lin, Ching-Ting
;
Liu, Pang-Shivan
;
Yu, Ming-Hue
;
Hou, Tuo-Hung
Transition metal dichalcogenide (TMD)-based field effect transistors are currently being actively researched as a post-silicon solution for integrated circuits. This paper discusses two of the major challenges: grain size in polycrystalline TMD monolayer films and chemical doping to improve TMD/metal contacts. The characterization techniques and the correlation with device electrical characteristics are investigated.