Browsing by Author "Zhang, He-Xin"

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Impact of the Stacking Order of HfOX and AlOX Dielectric Films on RRAM Switching Mechanisms to Behave Digital Resistive Switching and Synaptic Characteristics
(2019-01-01)
Chuang, Kai-Chi
;
Chu, Chi-Yan
;
Zhang, He-Xin
;
Luo, Jun-Dao
;
Li, Wei-Shuo
Resistive random access memory (RRAM) devices with analog resistive switching are expected to be beneficial for neuromorphic applications, and consecutive voltage sweeps or pulses can be applied to change the device conductance and behave synaptic characteristics. In this paper, RRAM devices with a reverse stacking order of 6-nm-thick HfOx and 2-nm-thick AlOx dielectric films were fabricated. The device with TiN/Ti/AlOx/HfOx/TiN stacked layers exhibited digital resistive switching, while the other device with TiN/Ti/HfOx/AlOx/TiN stacked layers could demonstrate synaptic characteristics that were analog set and reset processes under consecutive positive and negative voltage sweeps or a train of potentiation and depression pulses. Moreover, this device could also implement synaptic learning rules, spike-timing-dependent plasticity (STDP). Varying temperature measurements and linear fittings of the measured data were conducted to analyze current conduction mechanisms. As a result, the variation of resistive switching behavior between these two devices is attributed to the varying effectiveness of the oxygen scavenging ability of the Ti layer when put into contact with either AlOx or HfOx. Moreover, AlOx functioned as a diffusion limiting layer (DLL) in the device with TiN/Ti/HfOx/AlOx/TiN stacked layers, and gradual modulation of the production and annihilation of oxygen vacancies is the cause of synaptic characteristics .
Improvement of ferroelectric properties in undoped hafnium oxide thin films using thermal atomic layer deposition
(2019-06-01)
Luo, Jun-Dao
;
Zhang, He-Xin
;
Wang, Zheng-Ying
;
Gu, Siang-Sheng
;
Yeh, Yun-Tien
Modulating the water pulse time during thermal atomic layer deposition is an effective approach to enhancing the ferroelectric properties of undoped HfO2 thin films. Through grazing incidence X-ray diffraction (GI-XRD), it was observed that a shorter water pulse time can inhibit formation of the monoclinic phase and thereby obtain good remanent polarization. Transmission electron microscopy (TEM) images and GIXRD analysis were used to reveal the crystallization conditions of the undoped HfO2 thin films. By modulating the water pulse time during deposition of all samples, no impurities were found in these films via X-ray photoelectron spectroscopy. Moreover, samples with shorter water pulse times revealed lower binding energy and higher leakage current. However, electric measurement results of samples with shorter water pulse times revealed a higher remanent polarization of approximately 9 mu C cm(-2) and a coercive field of similar to 1.95 MV cm(-1) compared with other samples. After endurance testing, the films lasted for more than 10(8) cycles at 2.25 V, so they are ideally suited to low-power ferroelectric CMOS devices and nonvolatile memory applications. (c) 2019 The Japan Society of Applied Physics