Browsing by Author "Zhou, F."

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High-density nano-pillar SiOx-based resistive switching memory using nano-sphere lithography to fabricate a one diode - one resistor (1D-1R) architecture
(2014-01-01)
Chang, Y. F.
;
Ji, L.
;
Chen, Y. C.
;
Zhou, F.
;
Tsai, T. M.
A highly compact, one diode - one resistor (1D-1R) nano-pillar device architecture has been demonstrated using nano-sphere lithography (NSL) to fabricate SiOx-based resistive switching (RS) memory. The intrinsic SiOx-based resistive switching element and Si-based PN diode are self-aligned on the epitaxial silicon wafer using NSL and a deep-Si-etch process without using conventional photolithography. The DC electrical performance, an AC pulse response in the 50 ns regime, capability for multi-bit operation, and high readout margin immunity for sneak path issue demonstrate good potential for high-speed nonvolatile memory (NVM). The NSL fabrication process is an efficient, economical approach to enable large-scale patterning of 1D-1R architectures while providing excellent NVM performance for future applications.