Browsing by Author "Zhou, MengChu"

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A Petri-Net approach to modular supervision with conflict resolution for semiconductor manufacturing systems
(2007-10-01)
Lee, Jin Shyan
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Zhou, MengChu
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Hsu, Pau Lo
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電控工程研究所
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Institute of Electrical and Control Engineering
In a semiconductor manufacturing system, particular human operations may violate desired requirements and lead to destructive failure. For such human-in-the-loop systems, this paper proposes a supervisory framework which guarantees that manual operations meet required specifications so as to prevent human errors in operation using Petri nets. Moreover, a modular technique with an intersection mechanism is proposed in order to cope with the state-space explosion problem of large-scale systems. A rapid thermal process in semiconductor manufacturing systems is provided to show the practicability of the proposed approach.
Multiparadigm modeling for hybrid dynamic systems using a Petri net framework
(2008-03-01)
Lee, Jin-Shyan
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Zhou, MengChu
;
Hsu, Pau-Lo
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電機資訊學士班
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Undergraduate Honors Program of Electrical Engineering and Computer Science
Recently, modeling and simulation of hybrid dynamic systems (HDSs) have attracted much attention. However, since simultaneously dealing with the discrete and continuous variables is very difficult, most of the models result in a unified but more complicated and unnatural format. Moreover, design engineers cannot be allowed to use their preferred domain models. Based on the multiparadigm modeling concept, this correspondence proposes a Petri net framework with associated state equations to model the HDSs. In the presented approach, modeling schemes of the hybrid systems are separated but combined in a hierarchical way through specified interfaces. Designers can still work in their familiar domain-specific modeling paradigms, and the heterogeneity is hidden when composing large systems. An application to a rapid thermal process in semiconductor manufacturing is provided to demonstrate the practicability of the developed approach.