Browsing by Author 劉岳良
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Issue Date | Title | Author(s) |
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1991 | 以CF□/CHF□/O□或CF□/NF□/O□對二氧化矽與經離子佈植的多晶矽之乾式蝕刻 | 劉岳良; LIU, YUE-LIANG; 龍文安; LONG, WEN-AN; 應用化學系碩博士班 |
Issue Date | Title | Author(s) |
---|---|---|
1991 | 以CF□/CHF□/O□或CF□/NF□/O□對二氧化矽與經離子佈植的多晶矽之乾式蝕刻 | 劉岳良; LIU, YUE-LIANG; 龍文安; LONG, WEN-AN; 應用化學系碩博士班 |