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2000銅導線化學機械研磨之研究—機制,膠體研磨粒子漿料及在嵌入式製程之應用劉靜茵; Jing - In Liu; 涂肇嘉; 蔡明蒔; George C. Tu; Ming-Shih Tsai; 材料科學與工程學系
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