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2000低介電常數材料氟化非晶系碳膜蝕刻特性研究吳育恆; Wu Yu-Hen; 吳耀銓; 謝嘉民; 馮明憲; Yew-Chung, sermon, Wu; Jia-Ming Shieh; Ming-Shiann Feng; 材料科學與工程學系
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