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Browsing by Author 李捷弘

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2007低壓化學氣相沈積之BTBAS氮化矽薄膜在65奈米電晶體側壁空間層之應用(利用田口式實驗設計方法進行製程參數最佳化)李捷弘; 吳耀銓; 工學院半導體材料與製程設備學程
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