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Browsing by Author 林明杰

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Issue DateTitleAuthor(s)
1994電子迴旋共振化學氣相沉積之氧化矽膜及鎢在六氟化硫,氟化氮與氮氣的電漿蝕刻林明杰; Ming-Jyer Lin; 張國明; Kow-Ming Chang; 電子研究所
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