Browsing by Author 王芳崇
Showing results 1 to 2 of 2
Issue Date | Title | Author(s) |
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1991 | Plasma etching of Si and polycrystalline silicon with CCl□ F and its mixture gases | 王芳崇; Wang, Fang-Chong; 龍文安; Long, Wen-An; 應用化學系碩博士班 |
1991 | 以三氯氟甲烷及其混合氣體對矽與多晶矽的電漿蝕刻 | 王芳崇; WANG, FANG-CHONG; 龍文安; LONG, WEN-AN; 應用化學系碩博士班 |