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Browsing by Author 謝元智

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Issue DateTitleAuthor(s)
1995以電漿輔助化學氣相沈積低介電常數之含氟氧化物薄膜的化學機械研磨技術與材料特性研究謝元智; Hsieh, Yuan-Tsu; 馮明憲, 戴寶通; Feng Ming-Shiann, Dai Bau-Tong; 材料科學與工程學系
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