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Browsing by Author 邱沅明

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2011以平行化二維流體模型模擬CF4低溫電感耦合式電漿源蝕刻二氧化矽(SiO2)之研究邱沅明; Chiu, Yuan-Ming; 吳宗信; Wu, Jong-Shinn; 機械工程學系
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