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2002使用電子迴旋共振電漿處理技術於表面蝕刻之特性研究及開發氮化鎵的閘極介電與鈍化絕緣薄膜之應用鄭兆禛; Chao-Chen Cheng; 張國明; Kow-Ming Chang; 電子研究所
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