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Issue DateTitleAuthor(s)
17-Nov-2003Dielectric characteristics of low-permittivity silicate using electron beam direct patterning for intermetal dielectric applicationsLiu, PT; Chang, TC; Tsai, TM; Lin, ZW; Chen, CW; Chen, BC; Sze, SM; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
30-Jan-2004Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applicationsChang, TC; Yan, ST; Liu, R; Lin, ZW; Aoki, H; Sze, SM; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
22-Nov-2004Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications (Vol 447, pg 516, 2004)Chang, TC; Yan, ST; Liu, PT; Lin, ZW; Aoki, H; Sze, SM; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics
Showing results 1 to 3 of 3