Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications (Vol 447, pg 516, 2004)

Title:	Extraction of electrical mechanisms of low-dielectric constant material MSZ for interconnect applications (Vol 447, pg 516, 2004)
Authors:	Chang, TC Yan, ST Liu, PT Lin, ZW Aoki, H Sze, SM 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
Issue Date:	22-Nov-2004
URI:	http://dx.doi.org/10.1016/j.tsf.2004.05.002 http://hdl.handle.net/11536/25630
ISSN:	0040-6090
DOI:	10.1016/j.tsf.2004.05.002
Journal:	THIN SOLID FILMS
Volume:	467
Issue:	1-2
Begin Page:	342
End Page:	342
Appears in Collections:	Articles

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