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Browsing by Author 蘇家偉

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2014由多區域溫度回授控制有機金屬化學氣象沉積製程晶圓溫度均勻度最大化蘇家偉; Su, Jia-Wei; 趙昌博; Chao, C.P.; 影像與生醫光電研究所
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